Mark T. Bohr
Intel Senior Fellow, Technology and Manufacturing Group
Director, Process Architecture and Integration
INTEL CORPORATION
Mark T. Bohr is an Intel Senior Fellow and Director
of Process Architecture and Integration. He works in Intel's Logic
Technology Development group located in Hillsboro, Oregon, where
he is responsible for directing process development activities
for Intel's advanced logic technologies.
He joined Intel in 1978 and has been responsible for process integration
and device design on a variety of process technologies for dynamic
RAM, static RAM and microprocessor products. The technologies
that he has helped to develop include: Intel's first CMOS technology
in 1981, the world's first CMOS DRAM technology in 1983, Intel's
first BiCMOS logic technology 1992, and recent 90 nm and 65 nm
logic technologies using strained silicon transistors and copper
+ low-k interconnects. He is currently directing development activities
for Intel's 45 nm logic technology.
Bohr was born in Chicago, Illinois in 1953.
He received the B.S. degree in industrial engineering in 1976
and the M.S. degree in electrical engineering in 1978, both from
the University of Illinois, Urbana-Champaign. In 1998 he received
the Distinguished Alumnus Award from the University of Illinois
department of Electrical and Computer Engineering. He serves as
the senior sponsor for the University of Illinois campus for Intel's
Academic Relations group.Bohr is a Fellow of the Institute of
Electrical and Electronics Engineers and was the recipient of
the 2003 IEEE Andrew S. Grove award. He has served on paper selection
committees for the International Electron Devices Meeting ('90-'91
and '96-'97) and for the Symposium on VLSI Technology ('94-'99)
and presently serves on the Executive Committee for the VLSI Symposia.
In 2005 he was elected to the National Academy of Engineering.
He holds 31 patents in the area of integrated circuit processing
and has authored or co-authored 39 published papers.
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